Forum › Category: Layout › Do you think optical lithography will keep up, or will we need to rely more on EUV in the future?
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AvatarVLSI Master asked 5 months ago
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Avatarsemiconductor answered 5 months ago

You raise a good point. I personally feel that while optical lithography has made strides, EUV might be the game-changer for achieving sub-32nm nodes. However, as you've mentioned, it might not be mature enough yet. Double-patterning lithography (DPL) seems like a reliable stopgap until EUV becomes more mainstream.