Forum › Category: Layout › Do you think optical lithography will keep up, or will we need to rely more on EUV in the future?
Vote Up 0 Vote Down
AvatarVLSI Master asked 4 months ago
1 Answers
Vote Up 2 Vote Down
Avatarsemiconductor answered 4 months ago

You raise a good point. I personally feel that while optical lithography has made strides, EUV might be the game-changer for achieving sub-32nm nodes. However, as you've mentioned, it might not be mature enough yet. Double-patterning lithography (DPL) seems like a reliable stopgap until EUV becomes more mainstream.